Introduction to Metrology (with CD-Rom) Applications in IC Manufacturing
Langue : Anglais
Auteur : SU Bo
Metrology has grown significantly, especially in semiconductor
manufacturing, and such growth necessitates increased expertise. Until
now, this field has never had a book written from the perspective of an
engineer in a modern IC manufacturing and development environment. The
topics in this Tutorial Text range from metrology at its most basic level
to future predictions and challenges, including measurement methods,
industrial applications, fundamentals of traditional measurement system
characterization and calibration, semiconductor-specific applications,
optical metrology measurement techniques, charged particle measurement
techniques, x-ray and in situ metrology, hybrid metrology, and mask
making. The accompanying CD includes example spreadsheets of measurement
uncertainty analysis-specifically, precision, matching, and relative
accuracy.
Date de parution : 11-2015
Ouvrage de 184 p.
Disponible chez l'éditeur (délai d'approvisionnement : 15 jours).
Prix indicatif 91,55 €
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